sublimation pump

In the sublimation pump, titanium is heated and sublimated under a high vacuum. A fresh titanium-deposited film is formed on the inner wall of the pump. The getter action (chemical adsorption of gas molecules) of the fresh film surface is efficient for pumping in the high-vacuum region. The working pressure is 10^-5 Pa or better. Since the pump needs heating, its long-time use is inadequate to maintain a high vacuum. To overcome this problem, the sublimation pump is combined with the ion pump, where the ion pump is constantly operated and the sublimation pump is operated when needed. The pump is not used so much to date.