side-entry type EDS detector

An EDS detector which is placed on the side of the objective lens with a viewing angle of 30° or less to a specimen set horizontally. Since the "side-entry type EDS detector" can be set near the objective lens, its detection solid-angle of emitted X-rays is large or its X-ray detection efficiency is high. To improve the accuracy of quantitative analysis, the diffusion length of the emitted X-rays in the specimen is required to decrease. For this purpose, the specimen is tilted as needed against the detector so that X-rays coming to the detector take a large angle against the specimen surface. Since the X-ray intensity is sensitive to the local roughness of the specimen, the accuracy of quantitative analysis is not high enough. However, this type detector is broadly used these days as it is suitable for the analysis of a smaller specimen area because it can be combined with a high resolution objective pole-piece which has a small gap and a small bore.

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