element (elemental) mapping
element (elemental) mapping
"Element (elemental) mapping" is carried out by using EELS spectra and EDS spectra. In the case of EELS mapping, the loss energy characteristic of each element in a core-loss spectrum is selected with the energy slit at the EELS mode, and then the mapping of the element is obtained by switching to the image mode. (This explanation is based on TEM-EELS but there is STEM-EELS method which uses the scanning technique like EDS mapping.) In the case of EDS mapping, the X-ray intensities characteristic of each element are measured while the electron beam is two-dimensionally scanned on the specimen, and then brightness modulations corresponding to the X-ray intensities are displayed on a computer monitor synchronized with the scanning signals. As a result, a two-dimensional distribution image of an element is obtained.
(a) High spatial resolution elemental maps acquired by EDS. Specimen: SrTiO3, Accelerating voltage: 80 kV.
X-ray spectra are acquired by two-dimensionally scanning the electron beam over the specimen, and intensities of characteristic X-rays of O-K, Ti-K and Sr-L are displayed on the corresponding scanning points. RGB map is the overlay of each elemental map.
(b) High spatial resolution elemental maps acquired by STEM-EELS. Specimen: SrTiO3, Accelerating voltage: 80 kV.
Core-loss spectra are acquired by two-dimensionally scanning the electron beam over the specimen, and intensities of energy-loss electrons of O-K, Ti-L and Sr-M are displayed on the corresponding scanning points. RGB map is the overlay of each elemental map.
(c) Elemental maps acquired by TEM-EELS using an Omega filter. Specimen: SiC/Si3N4, Accelerating voltage: 1250 kV.
Core-loss spectra (bottom-right figure) are acquired by TEM-EELS. Energy-loss intensities of C-K, N-K or O-K which are characteristic of respective elements are chosen with the energy selection slit. Then, the energy filtered images of the elements C, N and K are displayed as elemental maps. RGB map is the overlay of each elemental map. Elemental mapping using TEM-EELS enables to acquire a wide-field low-magnification elemental map image over an area of a few μm.
(a) High spatial resolution elemental maps acquired by EDS. Specimen: SrTiO3, Accelerating voltage: 80 kV.
X-ray spectra are acquired by two-dimensionally scanning the electron beam over the specimen, and intensities of characteristic X-rays of O-K, Ti-K and Sr-L are displayed on the corresponding scanning points. RGB map is the overlay of each elemental map.
(b) High spatial resolution elemental maps acquired by STEM-EELS. Specimen: SrTiO3, Accelerating voltage: 80 kV.
Core-loss spectra are acquired by two-dimensionally scanning the electron beam over the specimen, and intensities of energy-loss electrons of O-K, Ti-L and Sr-M are displayed on the corresponding scanning points. RGB map is the overlay of each elemental map.
(c) Elemental maps acquired by TEM-EELS using an Omega filter. Specimen: SiC/Si3N4, Accelerating voltage: 1250 kV.
Core-loss spectra (bottom-right figure) are acquired by TEM-EELS. Energy-loss intensities of C-K, N-K or O-K which are characteristic of respective elements are chosen with the energy selection slit. Then, the energy filtered images of the elements C, N and K are displayed as elemental maps. RGB map is the overlay of each elemental map. Elemental mapping using TEM-EELS enables to acquire a wide-field low-magnification elemental map image over an area of a few μm.
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