solid angle
solid angle
"Solid angle" for detection of EDS signals is a three-dimensional angle formed by the cross-sectional detection area (sphere) of the detector with respect to the incidence point of the electron beam on the specimen from which characteristic X-rays are emitted. The solid angle can be made larger for a larger detection area and a smaller distance between the specimen and the detector.
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Term(s) with "solid angle" in the description
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