windowless EDS detector

An EDS detector that does not use a window material for preventing contaminants onto its detector element. Since the windowless EDS detector suffers no X-ray absorption by the window material, the detector can analyze light elements such as beryllium (Be) and boron (B). Owing to a very high vacuum of the today’s microscope column and less severe deposition condition at Peltier cooling temperature than at liquid nitrogen temperature, the window material has become unnecessary. As a result, the windowless EDS detector has more been used in recent years.

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