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ion plating

ion plating

"Ion plating" is a technique to form a thin metal layer deposited on a surface of a solid by ionizing metal. In this technique, discharge is generated in a low vacuum or a gas environment between the substrate acting as a cathode and a metal evaporation source acting as an anode. Then, metal atoms are evaporated and ionized, and accelerated by an electric field, then finally form a thin layer on the substrate.