ion pump [sputter ion pump], SIP

A dry vacuum pump that does not use oil. In the sputter ion pump, residual gasses are ionized utilizing electric and magnetic fields. The produced ions strike a titanium cathode to sputter titanium atoms. Then, the sputtered titanium atoms form a fresh getter film (film subjected to chemical adsorption). As a result, active gasses (hydrogen, oxygen, carbon monoxide, etc.) are adsorbed to the getter film, and inert gasses (helium, etc.) are ionized and adsorbed to the cathode. The pump is used for evacuation of the electron gun chamber and the column of TEM, which require high vacuum. The working pressure is 10^-4 to 10^-9 Pa.