ion cleaner
ion cleaner
An ion cleaning tool that removes contaminants on a TEM specimen, which are residual substances deposited on a specimen at specimen pre-treatment, and contaminated substances deposited on a specimen in specimen storage. The specimen holder on which a specimen is set is inserted into an "ion cleaner." Then, a glow discharge due to residual gasses in the ion cleaner is generated and the ionized gasses by discharge irradiate the specimen. This chemical-reaction of the ionized gasses removes the contaminants (in particular, polymerized substances of hydrocarbons) deposited on the specimen.
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