JSM-IT300HR InTouchScope™ Scanning Electron Microscope

The JSM-IT300HR is a new model of JEOL InTouchScope Series.
Equipped with a new high-brightness electron gun and optical system, the JSM-IT300HR achieves superbly high-quality imaging and analysis with high sensitivity and high spatial-resolution.
This new cutting-edge SEM provides superb performance while maintaining high operability building on the award-winning InTouchScope Series.

Features

Superb Performance

High operability: High brightness electron gun for greatly reduced adjustment steps of observation to analysis

Even under analytical conditions (working distance 10 mm, probe current 1 nA), the JSM-IT300HR provides a sharp image at a high magnification of x100,000.

Conventional W-SEM

A sharp image at x100,000 can be acquired under the observation condition (left), but an image blurs under the analytical condition (right).  

x100,000　Observation condition (1 pA)
Specimen: Au particles

x100,000　Analytical condition (1 nA)
Specimen: Au particles

JSM-IT300HR

The JSM-IT300HR provides a sharp image even under analytical conditions.

Observation: Easy observation even at low accelerating voltage and in low vacuum mode

• Since the JSM-IT300HR provides a high-quality image even at high magnifications of x50,000 to x100,000, fine structures are readily observed.
• Low-voltage imaging and Low-vacuum mode imaging also enable high-quality image observation, so a beam-sensitive specimen is observed with reduced thermal damage and fine structures of an insulating material are readily observed.

Low accelerating voltage

• Reduced charging
• Reduced thermal damage due to beam irradiation

Specimen: Uncoated Cellulose nano-fibers (CNF)
Fine structures of each fiber are readily observed with a high magnification even at 1 kV.
Accelerating voltage: 1kV, Magnification: x30,000
High-vacuum mode, Secondary electron image

Specimen courtesy: Prof. H. Yano and Associate Prof. K. Abe,
Lab. of Active Bio-based Materials Research Institute for Sustainable Humanosphere,
Kyoto University

Low-vacuum mode and Low accelerating voltage

• Reduced charging
• Reduced thermal damage due to beam irradiation
• High spatial-resolution

Specimen: Uncoated cross section of optical thin film of blue-light cut glass milled by JIB-4000 Focused Ion Beam System.
In Low-vacuum mode, an insulated optical thin film is readily observed without conductive coating.
Accelerating voltage: 3kV, Magnification: x50,000
Low-vacuum mode, Backscattered electron composition image

Element analysis: ACL (aperture angle control lens) for smooth element analysis in a sub-micrometer area

Easier and faster data acquisition

• ”Smart” touch panel function for intuitive operation is incorporated, which is a feature of InTouchScope Series.
• Recipes are built in based on specimen category and application. These Recipes automatically set up SEM conditions which are optimized for the observation and analysis of any specimen type.
• The optional Stage Navigation System greatly facilitates searching of the observation field. A fully embedded CCD camera navigates a color image. When double-clicking on the color image, the stage quickly moves to the observation field.

Specifications

Introduction to JEOL Products

Scanning Electron Microscopes (SEM)

More Info