IB-09020CP Cross Section Specimen Preparation Device
DISCONTINUED
In addition to the functions of the IB-09010CP, the processing progress can be monitored in a real time using the attached CCD camera.
Features
A monitor camera (x20 to x100), which enables tracking of the processing progress, is mounted.
A function to automatically start the processing without waiting time is included. In this way, the process can be started at the optimal vacuum rate.
There is an optional 8kV power supply available, providing high processing speeds of 300μm/h (on a silicon substrate conversion basis, excrescence quantity : 100μm, 2 hours average)
Easy operation by touch panel
Specifications
| Ion accelerating voltage | 2 to 6kV |
|---|---|
| Ion-beam diameter | 500μm(full width at half maximum) |
| Milling speed | 100m/h (the average value over 2 hours, at accelerating voltage: 6 kV, specimen: Si, 100 m from edge) |
| Maximum specimen size | 11 mm (width) × 10 mm (length) × 2 mm (thickness) |
| Specimen movement range | X-axis:±10 mm, Y-axis:±3 mm |
| Specimen-rotation angle adjustment range |
±5° |
| Specimen-polishing swing angle | ±30 (patent applied for) |
| Operation | Touch panel |
| Gas | Argon (flow rate controlled by mass-flow controller) |
| Pressure measurement | Penning gauge |
| Main vacuum pump | Turbo-molecular pump |
| Dimensions and weights | Basic unit: 380mm(W)×570mm(D)×520mm(H), 66kg Rotary pump: 150mm(W)×427mm(D)×230.5mm(H), 16kg |
| Optional attachments | 8 kV Power Supply Specimen Rotation Holder(SM-09011) High Positioning CCD Camera(IB-83910CCD) Large Specimen Holder |
Installation Requirements
| Power | Single phase 100 to 120 V ±10% AC, 50/60 Hz, 0.5 to 0.6 kVA |
|---|---|
| Grounding terminal | 100Ω or less |
| Argon gas | Pressure: 0.15 ±0.05 MPa (1.0 to 2.0 kg/cm2) Purity: 99.9999% or more (argon gas, gas cylinder and regulator should be provided by the customer) Hose joint: JIS B0203, Rc 1/4 |
| Room temperature | 15 to 25℃ |
| Humidity | 60％ or less |
Specifications subject to change without prior notice.
Application
Application IB-09020CP
Auger Analysis of CP Cross Section
Cross-sectioning of urethane rubber by an Ar broad ion beam for SEM imaging
More Info
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