An Innovative Approach to Semiconductor Failure Analysis – The “HAXIS”
Release Date: 2026/10/09
As advanced semiconductor devices continue to shrink with increasing structure complexity, it has become increasingly difficult to directly probe nanoscale circuits using nano-manipulators. In addition, contact caused by probing may affect the analysis target, necessitating new failure analysis methods.
With extensive research on the Passive Voltage Contrast (PVC) detection technology, JEOL has established a new method for stable, highly reproducible PVC observation through the advancement of detector technology and sample preparation techniques.
The HAXIS LIM (Low-angle Ion Milling) - SEM Multi Beam System is JEOL’s new semiconductor failure analysis platform that integrates these technologies. It enables clear, highly reproducible PVC imaging, even in advanced semiconductor devices. By visually detecting electrical anomalies while minimizing the effects of processing damage and contamination, LIM-SEM can efficiently locate defects and determine their root cause. The use of the inert gas argon (Ar), ensures stable surface quality while reducing the instrument operation cost.
This seminar will be held on the web. You can participate not only from your PC, but also from your smartphone or tablet, as long as you have access to the web. We look forward to your participation.
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Presenter |
Noureddine Anibou
Semiconductor Business Development Manager 
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Date/Period |
Nov 5, 2026(Thu) |
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Fee |
Free |
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Q&A Session |
We will have a Q&A session following the presentation. You may submit your questions in advance via the registration form or use the Zoom Q&A feature during the webinar. |
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Contacts |
E-mail：sales1[at]jeol.co.jp
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Registration
Please register here.
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For details on registration and participation, please refer to the PDF.
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This webinar will be held via Zoom, which has a test meeting feature, so if you are new to Zoom, please click “Test Zoom” to try it out.
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Please note that we may not be able to accept registrations from other companies in the same industry.
Are you a medical professional or personnel engaged in medical care?
No
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