Beam size and X-ray emitting area
The spatial resolution of X-ray imaging in EPMA is approximately 1 um.This results in blurred X-ray images at magnifications over 3000x (Figure 1 b).This is caused mainly by the X-ray emitting area being enlarged by scattering of accelerated electrons within the sample.The X-ray emitting area changes its size due to other factors including beam size, X-ray absorption, and X-ray excitation.
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