An UHV-SPM from JEOL, Which Constantly Seeks for the Atomic World.
Features
Technology That Supports SPM
Stacked-share made scanner
As the scanner, which is the heart of the SPM, aJEOL-developed stacked-share mode scanner isemployed. It eliminates the image distortion causedby the interference between piezo elements and sat-isfies three requirements for obtaining high reso-nance frequency-"handy," "small," and "lightweight".
Specimen stage
The specimen stage, based on JEOL's most excel-lent precision EM-related technique, is of the topentry structure. This structure incorporates not onlythe idea of nanometer control of the specimen, butalso the idea of "drift-free". Providing the concentric heat diffusion from it, thestage allows stable SPM observation, thus displayingits effectiveness for in site observation. Furthermore,the specimen surface is largely opened, permittingaddition of many new functions.
Coarse movement mechanisms
These mechanisms require the finest movements inthe SPM. They allow the tip to safely approach ananometer region without causing the tip to hit thespecimen. The tip can be automatically moved cor-rectly by motor drive from outside of the vacuum.
Control Circuit
Tunneling currents that are detected by SPM areweak currents of the nanoampere order, making itnecessary to constantly study the noise problem.Also, the feedback circuit needs to be sufficientlyresistant to oscillation. These techniques, completedthrough the development of scanning microscope,are effective also for SPM.This control circuit can be used commonly for AFM.
WINSPM system
The WINSPM system is an integrated control anddata acquisition system developed for scanningprobe microscope. It allows not only SPM, l-V, STS,AFM, Force-Curve and LFM observation, but alsosimultaneous input and simultaneous display of up to4 channels. Besides, it is provided with more than100 image processing functions and more than 30graphic processing functions. Employing MS-win-dows, it allows the change to other applications (TIFFtype) and network connection to be carried out withease.
User-friendly Window system
he WINSPM software, which operates on MS-Win-dows offers a full mouse operation environment. Pro-vided with GUIs such as a menu system and dialogbox, it can be simply operated by anybody. Alsoequipped with a large-capacity memory, it can besmoothly operated even when many windows areopened at a time.
Control panel for maximum functional efficiency
The operational ease of the control panel is veryimportant for AFM and SPM scanning. The WINSPMsystem is provided with frequently-used parametersthat were carefully selected on the basis of pastresults. Finer parameter setting can be freely done byuse of the dialog box. Functions such as STS, CITS,and LITHOGRAPHY are all provided as standard.
Abundant image processing function
The WINSPM system is provided with more than 100types of image processing functions specificallydeveloped for SPM, which include 3D display, profil-ing, FFT, expansion, and particle analysis. Provided with a magnetooptical disk as standard, theWINSPM system allows full back-up of importantdata that outputs data to a laser printer or a color hard copier. Optional functions include the connection of the sec-ond monitor, which is used exclusively for image dis-play, real-time output to VTR, and image input andprocessing from VTR.
3-independent-chamber evacuation system
The ultrahigh vacuum evacuation system consists ofthree chambers, which can be evacuated indepen-dently. Thus, the system is constructed as a multi-task chamber which gives the individual chamberstheir respective roles. At the same time, this evacua-tion system is well balanced overall so as to provideultrahigh vacuum.
Vibration isolation system
The vibration isolation system is an important factorfor the SPM, which possesses an atomic or molecu-lar-level resolution. Mechanical vibrations are fullyisolated by directly connecting the vacuum chamberand the SPM to a gimbal-piston type air-suspendedvibration isolation system, which possesses excellentvertical and horizontal vibration isolating characteris-tics, and also by employing the basic SPM a top-hat-stack type vibration mechanism, which isolates bothhorizontal and vertical vibrations.
Abundant additional functions
Evaporator
This is used to vacuum evaporate the specimen with atomsdifferent from specimen atoms. It is provided with two 70-mm-dia. ports that face the specimen. Provisions are madefor carrying out evaporation from below at an angle of 40°,and evaporation can be done without contaminating por-tions other than the specimen as the ion source is collimat-ed.
Heating device
Specimen heating is an indispensable function for speci-men cleaning and for research of phase transition at hightemperatures and of surface structures. Also, MBErequires a function to heat the specimen indirectly. Theheating device has been developed to meet these needs. Itallows not only specimen flashing, but also specimenobservation while heating it.
Cooling device
Like specimen heating, specimen cooling is also neededfor research of phase transition of substances...in thiscase under low temperatures. It is especially effective forobserving superconducting materials at low temperatures.
Ultrahigh vacuum scanning electron microscope(UHV-SEM)
The SPM, which is well suited for atomic and molecular-level image observation, is not suited for wide area obser-vation. However, it is natural for SPM users to wish toobserve enlarged images of their desired fields of view.Addition of the SEM function assures not only the identifi-cation of the viewing area with the SPM, but also a widerange of observations from low-magnification observationto SPM observation. Also, the observation capability forthe relationship between the specimen and the tip and forthe tip state, is very effective for enhancing research effi-ciency. The newly-developed column for this UHV-SEMuses no cooling water to isolate vibrations, and is con-structed so as not to impair ultrahigh vacuum. This haseliminated the influence of vibrations on image observationand the fear of specimen contamination.The development of the ultrahigh vacuum SPM-SEMpromises the expandability of the SPM by complementingtheir respective defects.
Specifications
| Resolution | |
|---|---|
| Horizontal | 0.14 nm (STM) Atomic resolution (AFM) |
| Vertical | 0.01 nm (STM) Atomic resolution (AFM) |
| Mechanical movements (Driven by motors) | |
| Z movement (approach function): | Coarsely controls tip-specimen distance. |
| Auto approach mechanism | Built-in |
| X and Y movements (specimen shift function)Movement ranges | X and Y: 4 mm (±2 mm) (STM)
X and Y: 2 mm (±1 mm) (AFM) |
| Center position indicator | Buillt-in |
| Scanner | |
| Type | Stack share (STM). Tube (AFM) |
| Maximum movements | X and Y: 0.2 µm (200 nm), Z: 0.6 µm (STM)
X and Y: 10 µm, Z: 2.7 µm (AFM) |
| Scan rotation | Provided (–180 to +180°) |
| Scan range | |
| Variable range | 0 to 200 nm (variable in 12-bit step) (STM)
0 to 10 µm (variable in 12-bit step) (AFM) |
| Zoom function | Provided |
| Specimen | |
| Number of specimens per load | One (MGL is used for specimen exchange) |
| Specimen size | 10mm×10mm×5mm (t) max.(STM)
8mm×7.7mm×2mm (t) max.(AFM) 1mm×7mm×0.3mm (t) for heating |
| Specimen heating mechanism | |
| Heating method | Direct heating by specimen resistance |
| Heating temperature | R.T. (room temperature) to 1200°C or more |
| Drift | |
| System drift | 0.05 nm/s or less (at R.T. and high temperature) |
| Specimen treatment chamber | For specimen treatment, and tip and specimen parking |
| Ultimate pressure | Approx. 10 –7Pa |
| Specimen airlock | For tip and specimen exchange |
| Ultimate pressure | Approx. 10 –4Pa |
| Bakeout heater | Buillt-in |
More Info
Are you a medical professional or personnel engaged in medical care?
No
Please be reminded that these pages are not intended to provide the general public with information about the products.