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Thin Film Formation Equipment (E-Beam and Plasma Sources

Products

BS-80020CPPS Plasma Source for Low-temperature Process

BS-80020CPPS
Plasma Source
for Low-temperature Process

BS-80011BPG High-power Plasma Source for high-density plasma

BS-80011BPG
High-power Plasma Source
for high-density plasma

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DEVELOPMENT /
INSTALLATION CASES

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Science Basics

Easy explanation about mechanisms and
applications of JEOL products

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