Compact and Cost Effective New Direct Write E-Beam System
The new JBX-5500FS is a cost-effective, high resolution direct write tool that is PC-controlled and simple to use. A spot beam, vector scan system, the JBX-5500FS writes patterns at a minimum line width of 10nm at 50kV.
The JBX-5500FS can achieve writing accuracies in two separate modes:
- High Resolution Mode: Overlay accuracy of < 40nm (3 sigma) can be achieved at 50kV.
- High Speed Mode: High speed mode allows 1mm fields at 50kV or 2mm at 25kV.
The JBX-5500FS can accept parts/pieces and wafers up to 100mm substrates via a single wafer manual loader.