||Single phase AC 100-120 V ±10%, 50/60 Hz, 500-600 VA
||Type D (100 Ω or less)
Pressure: 0.15 ±0.05 MPa (1.0 to 2.0 kg/cm2)
Flow: approx. 0.2 ccm
Purity: 99.9999% or more
Hose fitting: JIS B0203 Rc 1/8
* Argon gas, gas cylinder, and regulator provided by user
||20 to 25°C
||60% or less
* Specifications and appearance are subject to change without notice due to limitation.
* A separate table is needed for the system.