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   PRODUCTS : Sample Preparation Equipment : Cross Section Polisher II  
Sample Prep.
Products
  
IB-09020CP Cross Section Polisher II (CP)

Ion beam cross section polisher with real time process monitoring.

  • CCD zoom camera (20 to 100x) for real time monitoring of the milling process
  • CCD camera incorporated in the stage to enhance the positional accuracy of milling spot
  • Auto process startup Optimum vacuum for milling
  • Cross sections 1 mm or more wide
  • Optional specimen rotation holder for flat surface polishing

Features

Process monitoring
Real time monitoring of the milling process by CCD zoom camera
Zoom control from 20 to 100x from the touch panel

Standard CCD camera (70x) for sample position monitoring (standard)
Easy sample positioning/monitoring

Touch panel operation
Milling conditions loaded by easy operation of LC operation panel

Optional 8 kV power supply to enhance milling speed
Increases ion accelerating voltage to 8 kV to speed up the process.

Specimen: Si wafer (approx. 700 μ m thick)

2 hour milling with 100 μ m protruding from shield plate
(Speed: Reference value)

Specimen rotation holder
Rotates the specimen during ion beam milling for both cross sectional and flat surface polishing.

Cross sectional polishing:
     For specimen with visible milling traces: e.g., porous materials, powder, fiber
Flat surface polishing:
     For finishing process: e.g., eliminating distorted layers in mirror polish

 

  
SEM Applications

Specimen rotation holder

Rotates specimen during milling; effective in cross sectioning of specimens with visible milling traces such as porous materials and powder.

See more >>

  
IB-09020CP Specifications
Ion accelerating voltage 2 to 6 kV (8 kV: option)
Ion beam size 500 µm (FWHM)
Milling speed

More than 100 µm/h (6kV),More than 300 µm/h (8kV)

Maximum specimen size 20 mm (W) x 10 mm (L) x 5 mm (T):option
Specimen movement X: ±10 mm; Y: ±3 mm
Tilt angle ±5°
Swing angle ±30° 
Operation Touch panel
Gas Ar gas (flow control by mass flow controller)
Pressure reading Penning gauge
Major evacuation Turbo molecular pump
Dimensions and weight Base unit: 545 mm (W) x 550 mm (D) x 420 mm (H), 66kg
Rotary pump: 150 mm (W) x 427 mm (D) x 230 mm (H), 16kg
Optional accessories 8kV power supply
Specimen rotation holder
High precision CCD camera for positioning
Large specimen holder
  
IB-09020CP Installation Requirements
Power supply Single phase 100 to 120V ±10%, 50/60 Hz, 0.5 to 0.6 kVA
Ground terminal Type D (100 Ω or less)
Argon gas Pressure: 0.15±0.05 MPa (1.0 to 2.0 kg/cm²)
Purity 99.999% or more (Argon gas, gas cylinder, and regulator provided by user)
Metal fixture JISB0203 RC 1/8
Room temperature 15 to 25°C
Humidity 60% or less

 Specifications and appearance are subject to change without notice due to modification.

  

Please Note

Not all JEOL products are available in every country. For specific information and more details about JEOL products available in your area, contact your local JEOL office or sales representative. Thank you.

  

 
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