Rotary Sensors are original products by JEOL. This Rotary Sensor is used for crystal oscillation type film thickness controller and used to monitor a deposition rate and film thickness in a vacuum depositon process. 6 or 12 crystals are incorporated in the head of the Rotary Sensor. When a crystal failure occurs, the crystal moves automatically and enable continuous evaporation process by using new crystal. The detection hole is in a fixed position, so there is no need to change the value of tooling factor each time a crystal is moved. It is useful for long-time and thick or multi films coating process. We have 2 types of sensor head, 180° (flat) type and 45° type.
| (A) Rotary Sensor head |
(B) Rotary Sensor (Body) |
(C) Electromagnetic valve kit |
| Spec |
Model |
Length * |
Model |
Spec |
Model |
180°
(Flat) |
BS-04120SSH |
200 mm |
BS-04010SSR |
5V |
BS-04160KIT |
| 300 mm |
BS-04020SSR |
| 350 mm |
BS-04030SSR |
| 400 mm |
BS-04040SSR |
| 450 mm |
BS-04050SSR |
| 480 mm |
BS-04060SSR |
| 45° |
BS-04130SSH |
500 mm |
BS-04070SSR |
24V |
BS-04170KT |
| 540 mm |
BS-04080SSR |
| 545 mm |
BS-04090SSR |
| 580 mm |
BS-04100SSR |
| 650 mm |
BS-04110SSR |
| |
|
|
* Length part, including sensor head, is inserted into the vacuum chamber
|
Select in the form of A + B + C
| Rotary Sensor head (180°) |
+ |
Rotary Sensor (200mm) |
+ |
Electromagnetic valve kit (5V) |
| BS-04120SSH |
BS-04010SSR |
BS-04160KIT |
As for 12 sensors, please contact us.