Electron beam sources for vacuum evaporation of metal and metal-oxide thin-films. We offer a wide variety of electron beam sources and crucibles. JEOL's electron beam sources have excellent properties in terms of beam spot shape, energy density, beam incident angle, high-speed sweeping, countermeasure against arcing and stability. Thus can attain good film thickness uniformity and superior reproducibility.

BS-60060DEBS	BS-60050EBS	BS-60030DGN
EBG-102UB6S	EBG-203UB6S	JEBG-303UA

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