JEOL BS-60060DEBS Electron Beam Source

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Thursday, May 17, 2012
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PRODUCTS : Industrial Equipment : Electron Beam Source : BS-60060DEBS

Industrial Equip.
Products

High-Power Electron Beam Source

Electron Beam Source

BS-60060DEBS

BS-60050EBS

BS-72050ICE Power Supply

JST-F Series Power Supplies

BS-60060DEBS Electron Beam Source

BS-60060DEBS inherits characteristics from BS-60050EBS and is compatible with JEBG-102UH0 (180° deflection) which is a best seller model for oxide films. This EB source enables stable and reproducible evaporation.

Features:

Decreased backscattered electrons entering into substrate
Variable accelerating voltage
High-speed sweeping (standard spec)
X: 130Hz (initial), Y: 540Hz (initial)
Vertical beam incident
Excellent melted remain of materials
Reproducibility of beam spot

BS-60060DEBS Key Product Features

Maximum power	6.4kW (-8kV, 0.8A)
Accelerating voltage range	-4 to -10 kV
Beam deflection angle	270°
XY sweep width	±20mm
Workable pressure	5x10^-5 Pa to 7x10^-2 Pa
Cooling water	5~8 L/min
External dimensions	207(W) x 215(D) x 140(H) mm
Crucible	Option

Examples of melted remains of ZrO₂ pellet (φ23×14tmm)

Examples of melted remains of fused silica pellet (φ32mm×13tmm)

Please Note

Not all JEOL products are available in every country. For specific information and more details about JEOL products available in your area, contact your local JEOL office or sales representative. Thank you.