The JEM-2300T is an energy dispersive X-ray spectrometer for transmission electron microscopy (TEM). Through simple operation, it is capable of acquiring data in qualitative/quantitative elemental analysis and 2D mapping at high sensitivity and high energy resolution.

High Energy Resolution

The system incorporates a new digital pulse processor and upgraded detector for efficient acquisition of X-ray spectral data featuring high energy resolution, achieving high speed analysis.

High Sensitivity Analysis of Light Elements

JEOL's unique ultra thin film window allows for high sensitivity analysis of light elements. The system maintains high energy resolution in the low energy range, capable of separating light element peaks such as boron, carbon, nitrogen, and oxygen.

Analysis Station

Analysis Station is an analytical system integrated to TEM.vIt acquires TEM operating parameters (magnification, accelerating voltage, etc.) during measurement.

Conditions for elemental mapping and multi point analysis can be preset on the STEM view. Data acquisition, storage, and management are automated.

Use of probe tracking for elemental mapping and multi point analysis allows for continuous measurement at high spatial resolution and high sensitivity, facilitating high precision analysis.

Carbon nano tube on boron nitride
Sample courtesy of: Prof. Yoshio Bando, Inorganic Nanostructured Materials, National Institute for Materials Science

When analyzing a thin film sample in TEM or SEM+STEM, selecting a sufficiently high level of accelerating voltage can eliminate the effect of incident electrons inside the sample, enabling ultra micro area analysis that is not possible with bulk samples.

Spectrum from the view area on the right Sample: Semiconductor device Specimen prepared by: FIB Instruments used: JEM-2100F/JED-2300T Electron probe: 1.5 nm Detection area: 30 mm2 Measurement time: 5 minutes Pixels: 128×128

Probe Tracking

Probe tracking is intended to maintain a constant sampling spot in long term analysis such as elemental mapping. It collects images of the analytical spot at regular intervals, compares these images with the initial view, and corrects the sample position as needed.

Left: Initial view
Right: Image acquired after stage movement.

Principle of Eagle Eye

In conventional mapping, the probe is scanned over a sample, and detected X-rays are accumulated to form a single spectrum. This technique often misses elements in micro areas since their volumes are small. Eagle Eye overlays spectra from all sampling points instead of accumulating them. This allows elements contained in a micro area to be detected as peaks if their concentration levels in the area are high.

Backscattered electron image + Ag (red) + Ca (blue) + Ti (green)	Sample: Black ore

Popup Spectrum

Specifying an area of interest on an elemental map can initiate acquisition of spectral data for qualitative and quantitative analysis. Data thus acquired are saved and retrieved for further study. Optional off-line analysis software is available for examination of analyzed data in an external PC.

Backscattered electron image Sample: Cross section of electronic device A spectrum is acquired from an area of interest by Popup Spectrum. Chemicals are identified and labeled after quantitative analysis.	Spectrum from framed area

Active Map

Active Map saves spectral data acquired from all sampling points. A click on the Map icon activates acquisition of images and elemental maps from the sampling points. Entry of elements prior to mapping is not necessary. Active Map automatically detects elements from the spectrum, and maps the detected elements. Elements supposedly not detected in auto qualitative analysis may be added manually for further mapping.

High speed elemental mapping with mini cup detector
Sample: Crucible
JSM-7001F: Accelerating voltage: 5 kV; probe current: 110 nA; acquisition time: live 50 sec.

High Resolution Elemental Mapping

SEM images and elemental maps are acquired at 4096 x 4096 pixels at maximum. Up to 4 images can be acquired simultaneously.

High resolution elemental maps (4096 x 4096 pixels); magnified view of framed area in monitor view (bottom left)