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   PRODUCTS : Electron Optics : Surface Analysis (SA) : JPS-9010 Series  
Electron Optics
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JPS-9010 Series

XPS for Surface Analysis

X-ray Photoelectron Spectroscopy (XPS) is an analytical technique to estimate the elemental composition and chemical state of the elements on the surface of a material by projecting soft X-ray onto the surface and detecting the energy of photoelectrons emitted from areas a few nm from the surface.

JPS-9010 Series

The photoelectron energy detected is specific to a certain element, and is determined by chemical bonding, reflecting chemical shift. Using X-rays as the source of excitation, XPS is effective in analyzing insulators.

XPS is a powerful analytical tool for material development and surface testing of a wide range of samples, including metals, semiconductors, high polymers, and advanced materials.

The JPS-9010 series offers three models to meet various research objectives and requirements: JPS-9010MC (with monochromatic X-ray source), JPS-9010MX, and JPS-9010TR featuring Total Reflection X-ray Photoelectron Spectroscopy (TRXPS), one of the first to incorporate this technique.

  • High accuracy energy analyzer
  • X-ray source to minimize damage to samples
  • Compact X-ray monochromator
  • Ultra high clean vacuum system; easy baking
  • Versatile auto analysis to support routine analysis
  • Large stage to accommodate large samples such as hard disk
  • Easy to use software
  • High speed peak separation software
  
JPS-9010 Series Specifications

Sensitivity and Resolution

  Intensity (cps) Resolution (eV)
Standard X-ray Source* 540,000 0.90
1,800,000 1.15
5,000,000 1.8
Monochromatic X-ray Source** 60,000 0.65

* When 3d5/s photoelectron spectra are acquired from a clean, flat silver sample with MgKa ray (converted to 300 W)
** When 3d5/s photoelectron spectra are acquired from a clean, flat silver sample with AlKa ray (converted to 600 W)

X-ray Source

Standard X-ray Source
(Ai-Mg twin target)
Accelerating Voltage Max. 12 kV
Emission Current Max. 50 mA
Voltage Stability Within 1%
Maximum Load Mg 500W
Al 600W
Monochromatic X-ray Source
(X-ray monochromator)
Accelerating Voltage Max. 12 kV
Emission Current Max. 50 mA
Voltage Stability Within 1%
Maximum Load Al 600W
Analyzing Crystal SiO2
Rowland Circle 200 mm

Energy Analyzer and Incident Lens System

Incident Lens 3 step cylindrical electrostatic lens
Hemispherical Analyzer Central orbit 100 mm
Incident Slit Slit width controller incorporated
Magnetic Shield Double mu metal shield
Energy Sweep Constant analyzer energy
Sweep Range 0 to 1480 eV
Energy Position Reproducibility ±0.05 eV
Detector Micro channel plate
Counting System Pulse count

Vacuum System

Sample Imaging
Ultimate Pressure 7x10-8 Pa (5x10-10 Torr) maximum
Vacuum System Auto evacuation / baking sequence
Main Pump 200 lit/s ion pump
Supplementary Pump 1600 lit/s sublimation pump
Vacuum Monitor Nude ion gauge
Baking System Heater integrated
Specimen Exchange Chamber
High Speed Ion Gun Incorporated
Vacuum System Auto evacuation baking/sequence
Main Pump 260 lit/s turbo molecular pump
Vacuum Monitor Penning gauge

  

Please Note

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