New and powerful FE-SEM combining ultra high resolution imaging and enhanced analytical capabilities
- Resolution: 1.5 nm (1 kV) in GB mode, 1.0 nm (15 kV)
- Accelerating voltage: 0. 1kV to 30 kV
- Magnification: 25 to 1,000,000x
- Ultra high resolution imaging comparable to cold FEG SEM
1.5 nm (1 kV) in GB mode, 1.0 nm (15 kV) - In-lens thermal FE gun
- Aperture angle control lens for optimum beam projection regardless of the level of probe current
- Analytical capabilities at a maximum probe current of 200 nA (15 kV) to support various types of sample analysis (WDS, EDC, etc.)
- r-filter to control energy selection and image mixture rate for secondary electron and backscattered electron images.
- Gentle Beam mode to minimize beam damage for ultra surface imaging
- Designed to be energy efficient and environmentally friendly