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   PRODUCTS : Electron Optics : Scanning Electron Microscopes (SEM) : Semi-in-Lens FE : JSM-7600F  
Electron Optics
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JSM-7600F Scanning Electron Microscope

JSM-7600FNew and powerful FE-SEM combining ultra high resolution imaging and enhanced analytical capabilities

  • Resolution: 1.5 nm (1 kV) in GB mode, 1.0 nm (15 kV)
  • Accelerating voltage: 0. 1kV to 30 kV
  • Magnification: 25 to 1,000,000x
  • Ultra high resolution imaging comparable to cold FEG SEM
    1.5 nm (1 kV) in GB mode, 1.0 nm (15 kV)
  • In-lens thermal FE gun
  • Aperture angle control lens for optimum beam projection regardless of the level of probe current
  • Analytical capabilities at a maximum probe current of 200 nA (15 kV) to support various types of sample analysis (WDS, EDC, etc.)
  • r-filter to control energy selection and image mixture rate for secondary electron and backscattered electron images.
  • Gentle Beam mode to minimize beam damage for ultra surface imaging
  • Designed to be energy efficient and environmentally friendly
  
JSM-7600F Specifications
SEI resolution 1.5 nm (1 kV) in GB mode, 1.0 nm (15 kV)
Magnification 25 to 1,000,000x
Accelerating voltage 0.1 to 30 kV
Beam current 1 pA to 200 nA at 15 kV
Aperture angle control lens Integrated
Detector Upper and lower detectors
Energy Filter New r-filter
Gentle beam Integrated
Digital images 1,280 x 960, 2,560 x 1,920, 5,120 x 3,840
Specimen exchange chamber Single step loading/unloading
Specimen stage Eucentric, 5 axis motor drive
Type IA II III
X-Y 70 mm x 50 mm 110 mm x 80 mm 140 mm x 80 mm
Tilt -5 to +70° -5 to +60° -5 to +60°
Rotation 360° 360° 360°
Working distance 1.5 mm to 25 mm 1.5 mm to 25 mm 1.5 mm to 25 mm
Vacuum system 2 SIPs, magnetic bearing TMP, RP
Energy efficient design Normal operation: 1.2 kVA
Sleep mode: 1 kVA
Operation system OFF: 0.76 kVA
  
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