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JEOL Conventional Tungsten High/Low Vacuum SEMs
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- High Vacuum: Ideal for failure analysis, inspection, and characterization.
- Low Vacuum: For imaging and X-ray analysis of wet, nonconductive, unprepared samples.
Available Models
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Resolution |
Accelerating
Voltage |
Magnification |
Stage |
| JSM-6510 |
3.0nm |
0.3 to 30 kV |
x5 to 300,000
(printed as a 128mm x 96mm micrograph) |
GS Type: X=20mm, Y=10mm |
| LGS Type: X=80mm, Y=40mm |
| JSM-6510LV |
HV 3.0nm
LV 4.0nm |
0.5 to 30 kV |
x5 to 300,000
(printed as a 128mm x 96mm micrograph) |
GS Type: X=20mm, Y=10mm |
| LGS Type: X=80mm, Y=40mm |
| JSM-6610 |
3.0nm |
0.3 to 30 kV |
x5 to 300,000
(printed as a 128mm x 96mm micrograph) |
X=125mm, Y=100mm |
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JSM-6610LV
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HV 3.0nm
LV 4.0nm |
0.3 to 30 kV |
x5 to 300,000
(printed as a 128mm x 96mm micrograph) |
X=125mm, Y=100mm |
| JCM-5700 |
5.0nm |
0.5 to 20 kV |
x8 to 300,000
(printed as a 128mm x 96mm micrograph) |
GS Type: X=20mm, Y=10mm, Z=5mm-48mm |
| MS Type: X=80mm, Y=40mm, Z=5mm-48mm |
| JCM-5000 |
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15 kV, 10 kV, 5kV
(3-position switch) |
x10 to 20,000
(printed as a 128mm x 96mm micrograph) |
Manual control for X and Y
X: 35mm, Y: 35mm |
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