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| | JEOL Conventional Tungsten High Vacuum SEMs | |
| - Ideal for failure analysis, inspection, and characterization.
Available Models
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Resolution |
Accelerating
Voltage |
Magnification |
Stage |
| JCM-5700 |
5.0nm |
0.5 to 20 kV |
x8 to 300,000 |
GS Type: X=20mm, Y=10mm, Z=5mm-48mm |
| MS Type: X=80mm, Y=40mm, Z=5mm-48mm |
| JSM-6390 |
3.0nm |
0.5 to 30 kV |
x5 to 300,000 |
X=125mm, Y=100mm |
| JSM-6390A |
| JSM-6490 |
3.0nm |
0.3 to 30 kV |
x5 to 300,000 |
X=125mm, Y=100mm |
| JSM-6490A |
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