The JSM-6610A/JSM-6610LA analytical scanning electron microscopes integrate JEOL’s elemental analyzer (EDS).The compact EDS is controlled by the PC incorporated in the SEM base unit. The operator can use a single mouse can handle for operations ranging from imaging to elemental analysis.
Large specimen chamber and motorized specimen stage
The specimen chamber accommodates samples up to 200 mm in diameter. The specimen stage is motor driven in all 5 axes for efficient specimen movement and imaging.
Operation windows
The new intuitive GUI is designed to facilitate and speed up operation procedures.
Support of multiple users
Individual users can customize frequently used icons on the GUI to create efficient operating environment. The customized settings are loaded by User Login.
Simultaneous display of 2 images
Live secondary electron and backscattered electron images are displayed side by side, allowing the operator to observe the topography and composition of the sample simultaneously.
Metrology of micro structures
A variety of metrological functions are available. The image being viewed can be directly measured, and results are attached to the SEM image to be saved in file.
Three dimensional photographs can be collected using the standard eucentric specimen stage. An optional program, 3D Sight, is designed to create a birds-eye view from the photos to measure the sample surface and height.
Seamless operation from imaging to element analysis
The analytical scanning electron microscope has 2 monitors: one for SEM imaging and the other for elemental analysis (EDS).A single mouse controls both monitors. The large screens insure ease and comfort during operation.
Easy maintenance
The Factory centered filament is easy to replace, assuring stable high performance for a long period of time.The GUI includes a video showing filament maintenance step by step.
Reliable vacuum system
The vacuum system uses a high performance diffusion pump to assure clean high vacuum. The diffusion pump, having no movable parts, features stable operation and easy maintenance.