Observation and analysis of nano structures
Observation of nano-structures
The unique high power optics of JSM-7100F guarantees 1.2nm resolution. High magnification for the study of nano-structures is easily obtained.
Stable high precision analysis
The in-lens thermal FEG produces a stable large probe current. You can obtain high quality observation and analysis results. The emitter is guaranteed for 3 years.
The objective lens of the JSM-7100F does not form magnetic field around a specimen. Magnetic specimens can be observed and analyzed without restriction.
Analysis of nano-structures
A small probe diameter is obtained with the patented aperture angle optimizing lens. You can acquire high precision analyses and high quality elemental maps in a short time by using a large probe current.
A variety of analytical equipment including EDS, WDS, and EBSD can be mounted their ideal geometry.
A specimen is introduced through the specimen exchange airlock chamber. The specimen chamber is always kept in clean high vacuum. The unique one action specimen exchange mechanism lets you insert and remove a specimen with simple operation. The specimen chamber is pumped with a TMP.
In-lens thermal FEG
The patented in-lens thermal FEG is efficient and produces a maximum probe current of 200nA.
Aperture angle optimizing lens
The patented aperture angle optimizing lens automatically optimizes aperture angle of the objective lens to form a small electron probe diameter at large probe currents.
A variety of images, such as secondary electron images, backscattered electron images, and STEM images, are obtained. The stable thermal field emission electron source ensures research with high quality images.
Elemental analyses with EDS and WDS, and EBSD analysis are carried out efficiently. High precision analysis can be obtained with the stable electron probe.