jeoljp posted on January 30, 2012 21:33
FOR IMMEDIATE RELEASE
JEOL Ltd (President Gon-emon Kurihara) has announced the introduction of a new FE SEM JSM-7100F into the market.
An SEM has been used widely in a large variety of research and production fields. The JSM-7100F adopts the electron optics which has been proved to be the most powerful for high magnification observation and high precision analyses including crystal orientation analysis and cathode-luminescence as well as EDS and WDS. The JSM-7100F, a versatile high performance analytical tool, is easy to operate.
｜Features
・High resolution
The guaranteed resolution is 1.2nm (30kV), 3.0nm (1kV), and 3,0nm (15kV, probe current 5nA)
・High speed and high precision elemental analysis
The JSM-7100F always keeps an electron probe small even at large current. A large probe current shortens analysis time without sacrificing precision.
・Stable electron probe ensures consistent high performance
The unique in-lens thermal field emission electron source produces extremely stable electron probe for a long period of time. It ensures one to attain high quality results with EDS, WDS, EBSD, and CL anytime. An emitter in the patented in-lens thermal FEG has long life and is guaranteed for 3 years.
・Expandable to a variety of applications
In addition to a variety of analyses including EDS, WDS, EBSD, and CL, you can customize the JSM-7100F to suit your research requirements with the new low vacuum SEM mode up to 300Pa, the TTL system, which provides high resolution observation at very low accelerating voltage and selectively detects necessary information from a specimen, the large depth of focus (LDF) mode, which enables one to analyze a large area with EBSD, and an electron beam lithography system.
・Ecological design
The new ecological design has reduced the electric power consumption by 45% from the predecessor.
｜Principle specifications
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Resolution (SE image)
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1.2nm (30kV), 3.0nm (1kV)
3.0nm (15 kV, WD10mm, probe current 5nA)
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Magnification
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x10 to ×1,000,000
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Image
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Secondary electron image,Backscattered electron image
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Accelerating voltage
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0.2kV to 30kV
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Probe current
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Maximum 200nA
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Electron gun
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In-lens thermal electron gun
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Objective lens
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Conical objective lens
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Specimen stage
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5 axes motor controlled specimen stage
X-Y: 70mm to 50mm, Z: 3mm to 41mm
Tilt: -5 to +70degree, Rotation: 360degree endless
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Option
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EDS, WDS, EBSD, CL,Low vacuum mode, TTL system,
Electron beam lithography
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JEOL Ltd.
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.
For more information about JEOL Ltd. or any JEOL products, visit www.jeol.com, or call +81-42-543-1111.