hostjp posted on November 30, 2011 23:45
FOR IMMEDIATE RELEASE
JEOL Ltd. (Tokyo, President: Gon-enon Kurihara) and Mentor Graphics Corporation (Oregon, President: Gregory K. Hinckley) have developed advanced IC mask writing solutions “multi-resolution writing”.
This is one of the results of comprehensive collaboration for developing integrated hardware and software.
The multi-resolution writing work enables “shot” onto the mask blank to alternate between detailed and simplified versions for each pass in a multi-pass of vector e-beam writing system. The Mentor provides mask process correction software to ensure the correct image is ultimately printed from the sum of exposures, with shot count being reduced up to 30% compared to the conventional technique, and also provides optimized interfaces between the software and JEOL mask writer JBX-3200MV / JBX-30XXMV / JBX-9000MV.
Previously, JEOL and Mentor worked jointly on developing solutions to correct process effects associated with 50 keV e-beam mask writing and on demonstration of the dose encoding algorithm used within the JEOL data specification.
Mentor Graphics
Mentor Graphics Corporation (NASDAQ: MENT) is a world leader in electronic hardware and software design solutions, providing products, consulting services and award-winning support for the world’s most successful electronic, semiconductor and systems companies. Established in 1981, the company reported revenues over the last 12 months of about $915 million. Corporate headquarters are located at 8005 S.W. Boeckman Road, Wilsonville, Oregon 97070-7777. World Wide Web site: http://www.mentor.com/.
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JEOL Ltd.
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.
For more information about JEOL Ltd. or any JEOL products, visit www.jeol.com, or call +81-42-543-1111.